4. Electron capture detector (ECD) 

• Detection limit : ≤1×10 -13 g/ml (BHH-isooctane solution) 

• Baseline noise : ≤ 0.03mV 

• Baseline drift : ≤ 0.2mV /30min 

• Linear range : 10 3 

• Radiation source : 63Ni 

5. Flame Photometric Detector (FPD) 

• Linear range : for Phosphorus ≥103

• Detection limit : ≤5 × 10-11g/s (S thiophene)

(P)≤1×10 -12 g/s; (methyl parathion-absolute ethanol solution)

• Baseline noise : ≤ 3 × 10 - 1 3 A 

• Baseline drift : ≤ 2 ×10 - 12 A/30min 

• Linear range : for Sulfur ≥102

6. Nitrogen and phosphorus detector (NPD) 

• Detection limit : (N)≤5×10 -13 g/s, 

(P)≤5×10 -13 g/s; (methyl parathion-absolute ethanol solution) 

• Baseline noise : ≤ 5 × 10 - 1 3 A 

• Baseline drift : ≤ 2 ×10 - 12 A/30min 

• Linear range : nitrogen ≥ 10 2 , phosphorus ≥ 10 2 

7. Electronic gas pressure and flow measurement system:

• Flow measuring range : 0~500 sccm;

• Standard pressure level : 0.01 kPa;

• Pressure sensors : maximum 13;

• Pressure range : 0 ~ 0.3 MPa;

• Pressure and flow calculation algorithm : 13 bands; (temperature automatic 

compensation algorithm and atmospheric pressure) Flow measurement sensor: 3 lanes (maximum); gases: nitrogen, air, hydrogen, helium, argon;